Hall effect device

ABSTRACT

A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.

REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. application Ser. No.15/349,004 filed on Nov. 11, 2016, which is a divisional of U.S.application Ser. No. 14/933,351 filed on Nov. 5, 2015, which is acontinuation of U.S. application Ser. No. 13/613,986 filed on Sep. 13,2012, now U.S. Pat. No. 9,217,783 issued on Dec. 22, 2015, the contentsof which are incorporated by reference in its entirety.

FIELD

Embodiments relate to a Hall effect device indicative of a magneticfield. Some embodiments relate to a Hall effect device or a Hall sensorwith operated terminals. Some embodiments relate to a method ofmanufacturing a Hall effect device indicative of a magnetic field.Moreover, some embodiments relate to a method of calibrating a Halleffect device indicative of a magnetic field.

BACKGROUND

Hall effect devices are magnetic field sensors that are adapted to sensea magnetic field based on the Hall effect. Moreover, Hall effect devicescan be used for a variety of applications, such as proximity switching,positioning, speed detection and current sensing applications.

However, a major drawback of Hall effect devices (Hall plates or Hallsensors) is their high offset voltage, i.e. the output voltage at thesense contacts in the absence of a magnetic field componentperpendicular to the surface of the active Hall region of the Halleffect device. Also contributing to the offset are all physical effectswhich cause an asymmetry in the potential distribution of the activeHall region. Possible sources include piezoresistive effects,geometrical errors, temperature gradients, non-linear materialproperties, etc. Additionally, the various offset sources may changeover the lifetime of the Hall effect device.

SUMMARY

Embodiments provide a Hall effect device indicative of a magnetic field.The Hall effect device comprises an active Hall region in asemiconductor substrate, and at least four terminal structures, eachterminal structure comprising a switchable supply contact element and asense contact element, wherein each supply contact element comprises atransistor element with a first transistor terminal, a second transistorterminal, and a control terminal, wherein the second transistor terminalcontacts the active Hall region or extends in the active Hall region;and wherein the sense contact elements are arranged in the active Hallregion and neighboring to the switchable supply contact elements.

Moreover, embodiments provide a method of manufacturing a Hall effectdevice indicative of a magnetic field. The method comprises providing anactive Hall region of a first semiconductor type formed in or on top ofa substrate, wherein the substrate comprises an isolation arrangement toisolate the Hall effect region in a lateral direction and a depthdirection from the substrate or other electronic devices in thesubstrate. The method further comprises providing four supply contactelements at the active Hall region, wherein each supply contact elementcomprises a transistor element with a first transistor terminal, asecond transistor terminal, and a control terminal, wherein the secondtransistor terminal contacts the active Hall region or extends in theactive Hall region. Lastly, the method comprises providing at least foursense contact elements in the active Hall region, wherein the sensecontact elements are placed neighboring to the switchable supply contactelements.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are described herein makingreference to the appended figures.

FIG. 1a shows a schematic top view of a Hall effect device according toan embodiment of the present invention;

FIG. 1b shows a schematic top view of example forms of the active areaof a Hall effect device according to an embodiment of the presentinvention

FIG. 1c shows a principle illustration of an example Hall effect devicetogether with an associated controller circuit according to anembodiment of the present invention;

FIGS. 1d (1)-1 d(2) show a principle illustration of different modes ofa calibration operation of an example Hall effect device under thecontrol of the associated controller circuit according to anotherembodiment of the present invention;

FIG. 2a shows a schematic top view of an example Hall effect deviceaccording to another embodiment of the present invention;

FIG. 2b shows a schematic cross-sectional view of an example Hall effectdevice according to another embodiment of the present invention;

FIG. 3a shows a schematic top view of an example Hall effect deviceaccording to another embodiment of the present invention;

FIG. 3b shows a schematic cross-sectional view of an example Hall effectdevice according to another embodiment of the present invention; and

FIG. 4 shows a flowchart of a method for manufacturing a Hall effectdevice according to another embodiment of the present invention.

DETAILED DESCRIPTION

Before embodiments of the present invention will be described in thefollowing in detail using the accompanying figures, it is to be pointedout that same elements or elements having the same functionality areprovided with the same or equivalent reference numbers and that arepeated description of elements provided with the same or equivalentreference numbers is typically omitted. Descriptions provided forelements having the same or equivalent reference numbers are mutuallyexchangeable.

In the following description, a plurality of details is set forth toprovide a more thorough explanation of embodiments of the presentinvention. However, it will be apparent to one of ordinary skill in theart that embodiments of the present invention may be practiced withoutthese specific details. In other instances, well-known structures anddevices are shown in block diagram form rather than in detail in orderto avoid obscuring embodiments of the present invention. In otherinstances, well-known structures and devices are shown in schematiccross-sectional views or top-views rather than in detail in order toavoid obscuring embodiments of the present invention. In addition,features of the different embodiments described herein may be combinedwith each other, unless specifically noted otherwise.

In the field of Hall effect devices (Hall sensors), the magneticsensitivity of a Hall effect device depends (among other topics) on thegeometry of the sense contacts of the active Hall region (Hall plate).Sense contacts having a small dimension (parallel to the flowingdirection of the control or biasing current through the active Hallregion) provide a higher magnetic sensitivity than broad Hall signalsense contacts which have a large dimension in a direction parallel tothe control or biasing current through the active Hall region. Therespective geometry of the sense contacts can effect an increasedsensitivity in the range of about 25% or even more.

FIG. 1a shows a schematic top view of a Hall effect device 100 accordingto an embodiment. The Hall effect device 100 comprises an active Hallregion 10 in a semiconductor substrate 20 and at least four terminalstructures 30, 40, 50 and 60. Each terminal structure 30, 40, 50 and 60comprises a switchable supply contact element 32, 42, 52 or 62 and asense contact element 34, 44, 54, 64. Moreover, each switchable supplycontact element 32, 42, 52, 62 comprises a transistor element with afirst transistor terminal 32 a, 42 a, 52 a, 62 a, a second transistorterminal 32 b, 42 b, 52 b, 62 b and a control terminal 32 c, 42 c, 52 c,62 c.

As shown in FIG. 1a , the second transistor terminals 32 b, 42 b, 52 b,62 b contact the active Hall region 10 or extend into the active Hallregion 10. Moreover, the sense contact elements 34, 44, 54, 64 arearranged in the active Hall region 10 and neighboring (or adjacent) tothe switchable supply contact elements 32, 42, 52, 62.

As shown in FIG. 1a , moreover the sense contact elements 34, 44, 54, 64may be respectively connected to a connection line (conductor) 34-1,44-1, 54-1, 64-1. The first transistor terminal of each of the fourtransistor elements 32, 42, 52, 62 may be respectively connected with aconnection line (conductor) 32-1, 42-1, 52-1, 62-1. Moreover, thecontrol terminal 32 c, 42 c, 52 c, 62 c may be respectively connectedwith a connection line (conductor) 32-2, 42-2, 52-2, 62-2. Theconnection lines 32-1, 42-1, 52-1, 62-1/32-2, 42-2, 52-2, 62-2/34-1,44-1, 54-1, 64-1 may be provided to electrically connect or couple thedifferent contact elements or terminals of the Hall effect device 100with a controller or multiplexer circuit (not shown in FIG. 1a ).

The transistor elements may comprise either bipolar junction transistorsor field effect transistors. Alternatively, at least one of thetransistor elements may comprise a bipolar junction transistor, whereinthe remaining transistor element(s) may comprise a field effecttransistor. Alternatively, at least one of the transistor elements maycomprise a field effect transistor, wherein the remaining transistorelement(s) may comprise a bipolar junction transistor.

The at least four terminal structures 30, 40, 50, 60 form a first pairof opposing terminal structures 30, 50 and a second pair of opposingterminal structures 40, 60. A first (virtual) conjugation line “A”between the opposing terminal structures 30, 50 of the first pair and asecond (virtual) conjugation line “B” between the opposing terminalsstructures 40, 60 of the second pair orthogonally intersect in a centerpoint 12 of the active Hall region 10.

In other words, the first pair of opposing terminal structures 30, 50comprises a first pair of opposing supply contact elements 32, 52 and afirst pair of opposing sense contact elements 34, 54. The second pair ofopposing terminal structures 40, 60 comprises a second pair of opposingsupply contact elements 42, 62 and a second pair of opposing sensecontacts elements 44, 64.

As shown in FIG. 1a , the terminal structures 30, 50 of the first pairof opposing terminal structures respectively oppose each other withrespect to the center point 12 of the active Hall region 10. Further,the terminal structures 40, 60 of the second pair of opposing terminalstructures respectively oppose each other with respect to the centerpoint 12 of the active Hall region 10.

In other words, the first pair of opposing terminal structures 30, 50and the second pair of opposing terminal structures 40, 60 are situatedrectangular to each other with respect to the center point 12 of theactive Hall region 10.

The Hall effect device 100 may comprise a plate-like active area 10 ofhomogenous conductivity and of a first semiconductive type (e.g.n-type), and four switchable supply contact elements 32, 42, 52, 62 andfour sense contact elements 34, 44, 54, 64 which are positioned in pairsat the boundary of the active Hall region 10. The terminal structuresare divided in opposing pairs of contact elements for biasing andanother for sensing the output voltage.

As shown in FIG. 1a , the example Hall effect device 100 may have anactive Hall region 10 with a boundary line in form of a (regular)octagon.

FIG. 1b shows a number of example active Hall regions of the Hall effectdevice 100 with different boundary lines and an example arrangement ofthe switchable supply contact elements and the sense contact elements.

As shown in FIG. 1b , a basic implementation of the active Hall region10 of the Hall effect device 100 may have a boundary line, for example,in form of a square (A), an octagon (B), a 4-armed cross (Greek cross)(C) or an 8-armed cross (D). Moreover, the Hall effect device 100 mayhave a plurality of (or at least three) triangular active sub-regions10-1, 10-2, 10-3 (E) forming the resulting active Hall region 10.

As shown in FIG. 1b , the Hall effect device 100 having the active Hallregion 10 in form of a square or a 4-armed cross (Greek cross) comprisesthe switchable supply contact elements 32, 42, 52, 62 and the sensecontact elements 34, 44, 54, 64 as described above. Moreover, the Halleffect device 100 having the active Hall region 10 in form of an octagonor an 8-armed cross may additionally comprise further switchable supplycontact elements 32′, 42′, 52′, 62′ and further sense contact elements34′, 44′, 54′, 64′. The (above and below) explanations of the switchablesupply contact elements 32, 42, 52, 62 and the sense contact elements34, 44, 54, 64 are equally applicable to the further switchable supplycontact elements 32′, 42′, 52′, 62′ and the further sense contactelements 34′, 44′, 54′, 64′.

In some embodiments, the active hall region 10 may have a boundary linein form of an n-sided regular polygon, wherein n is a multiple of four(where n is 4, 8, 16, . . . ). Moreover, the active Hall region 10 mayhave m terminal structures with m n and m is a multiple of four (m is 4,8, 16, . . . ), wherein the terminal structures may be arranged atopposing sides of the regular polygon.

To be more specific, the terminal structures may be arranged in acentered (middle) position with respect to a midpoint of the respectiveside of the regular polygon. Alternatively, the terminal structures maybe arranged at opposing vertices of the regular polygon.

In general, the active hall region 10 may have a boundary line in theform of an n-sided polygon (e.g. a triangle, a quadrilateral, apentagon, a hexagon, a heptagon, a octagon, a enneagon, a decagon, ahendecagon, a dodecagon, a tridecagon or a higher order polygon),wherein n is at least three. Moreover, the active Hall region 10 mayhave m terminal structures with m≤n, wherein the terminal structures maybe arranged at sides or vertices of the polygon.

As further shown in FIG. 1b , the Hall effect device 100 may have (atleast) three triangular active sub-regions 10-1, 10-2, 10-3 which mayjointly form the resulting active Hall region 10. The first activesub-region 10-1 may comprise switchable supply contact elements 32, 42,52 and (respectively associated) sense contact elements 34, 44, 54. Thesecond active sub-region 10-2 may comprise switchable supply contactelements 32′, 42′, 52′ and (respectively associated) sense contactelements 34′, 44′, 54′. The third active sub-region 10-3 may compriseswitchable supply contact elements 32″, 42″, 52″ and (respectivelyassociated) sense contact elements 34″, 44″, 54″.

The switchable supply contact elements 32, 42, 52/32′, 42′, 52′/32″,42″, 52″ and the sense contact elements 34, 44, 54/34′, 44′, 54′/34″,44″, 54″ of the active sub-regions 10-1, 10-2, 10-3 are selectivelyinterconnected (e.g. by means of a control device) in such a way to formor provide the resulting active Hall device 10.

In some embodiments, the active Hall region 10 may have a boundary linein the form of an n-armed cross, wherein n is a multiple of four (wheren is 4, 8, 16 . . . ). Moreover, the active Hall region 10 may have mterminal structures with m≤n and m is a multiple of four (m is 4, 8, 16,. . . ), wherein the m terminal structures are arranged in opposing armsof the n-armed cross.

In general, the active Hall region 10 may have a boundary line in theform of an n-armed cross, wherein n is at least three.

FIG. 1c shows a schematic view of an example Hall effect device 100further comprising a control circuit 80, e.g. a microcontroller and/ormultiplexer, which is electrically connected or coupled to the terminalstructures 30, 40, 50, 60 of the Hall effect device over the connectionlines 32-1, 42-1, 52-1, 62-1/32-2, 42-2, 52-2, 62-2/34-1, 44-1, 54-1,64-1.

As shown in FIG. 1c , the coupling of the connection lines 32-1, 42-1,52-1, 62-1/32-2, 42-2, 52-2, 62-2/34-1, 44-1, 54-1, 64-1 is indicated bymeans of double-headed arrows for indicating an option of anunidirectional and/or bidirectional communication over at least oneconnection line or all connection lines. Thus, the control circuit 80can be configured to output a control or force signal to at least someof the connection lines or to each connection line and is furtherconfigured to receive a sense or measuring signal from at least some ofthe connection lines or from each connection line. Moreover, the controlcircuit 80 can output an output signal S_(OUT) indicating, for example,a proximity switching signal, a positioning signal, a speed detectionsignal and/or a current sensing signal based on at least one sensesignal received from the active region 10 of the Hall effect device 100.The received sense signal may, for example, be processed or rendered bythe control circuit or by another processing circuit (not shown in FIG.1c ) for providing the output signal S_(OUT).

The control circuit 80 can also be configured to apply different phasesof a spinning current operation (over the connection lines) to theterminal structures 30, 40, 50, 60 at the active Hall region 10.

The so-called spinning current operation is used to dynamically reducethe offset in the Hall effect device. To be more specific, the basicidea of the spinning current method deals with measuring the outputvoltage of the multi-contact Hall plate for different directions of thebiasing current. Averaging the output signal over one full switchingperiod of 360° separates the (spatially periodic) offset voltage fromthe Hall voltage.

To be more specific, the spinning current operation consists ofcontinuously cyclically rotating the direction of the biasing currentand, accordingly, the measurement direction for detecting the Hallvoltage at the active Hall region with a certain and synchronous changeof the current and measurement direction, by 360°/m for a Hall effectdevice 100 having m terminal structures, wherein m is a multiple of four(where m is 4, 8, 16, . . . ), for example by 90° (e.g. for asquare/quadratic or 4-armed active region having four terminalstructures) or for example by 45° (e.g. for an octagonal or 8-armedactive region having eight terminal structures) etc., and to average allmeasurement signals over one full switching period of 360°.

The control circuit 80 may be configured to selectively switch on one ofthe pairs of opposing supply contact elements for feeding a biasingcurrent, e.g. a control, operating or force current, in a predeterminedcurrent direction through the active Hall region 10, and to selectivelyswitch off the remaining supply contact elements during each of thedifferent phases of a spinning current operation.

The control circuit 80 may be further configured to sense a Hall signalbetween the pair of opposing sense contact elements, which are arrangedorthogonally to the pair of opposing supply contact elements, whichcurrently feed the control or biasing current to the active Hall region10.

The control circuit 80 may be further configured to apply a first tom-th (e.g. fourth) phase, i.e. m phases, of the spinning currentoperation to the terminal structures at the active Hall region 10, andto cyclically rotate (e.g., continuously) the control or biasing currentdirection through the active Hall region 10 and to cyclically rotate(e.g., continuously) the measurement direction for detecting a Hallvoltage U_(HALL) at the pairs of sense contact elements.

Thus, in an example first spinning current phase (with a clockwiserotation with respect to FIG. 1c ), the opposing supply contact elements32 and 52 are selectively switched on to feed a biasing current I_(BIAS)in a first current direction (from the second terminal 32 b of the firsttransistor element 32 to the second terminal 52 b of the thirdtransistor element 52). The remaining supply contact elements(transistor elements) 42, 62 are switched off. Moreover, a Hall signalor Hall voltage U_(HALL) is sensed between the pair of opposing sensecontact elements 44 and 64, which are arranged orthogonally to the pairof opposing supply contact elements 32, 52, which currently feed thebiasing current to the active Hall region 10 in the first biasingcurrent direction.

In an example second spinning current phase, the opposing supply contactelements 62 and 42 are selectively switched on to feed a biasing currentI_(BIAS) in a second current direction (from the second terminal 62 b ofthe fourth transistor element 62 to the second terminal 42 b of thesecond transistor element 42). The remaining supply contact elements(transistor elements) 32 and 52 are switched off. Moreover, a Hallsignal U_(HALL) (i.e. a Hall voltage) is sensed between the pair ofopposing sense contact elements 34 and 54, which are arrangedorthogonally to the pair of opposing supply contact elements 62, 42,which currently feed the biasing current to the active Hall region 10 inthe second biasing current direction.

Thus, in an example third spinning current phase, the opposing supplycontact elements 52 and 32 are selectively switched on to feed a biasingcurrent I_(BIAS) in a first current direction (from the second terminal52 b of the third transistor element 52 to the second terminal 32 b ofthe first transistor element 32). The remaining supply contact elements(transistor elements) 42, 62 are switched off. Moreover, a Hall signalU_(HALL) is sensed between the pair of opposing sense contact elements44 and 64, which are arranged orthogonally to the pair of opposingsupply contact elements 52, 32, which currently feed the biasing currentto the active Hall region 10 in the third biasing current direction.

In an example fourth spinning current phase, the opposing supply contactelements 42 and 62 are selectively switched on to feed a biasing currentin a second current direction (from the second terminal 42 b of thesecond transistor element 42 to the second terminal 62 b of the fourthtransistor element 62). The remaining supply contact elements(transistor elements) 32 and 52 are switched off. Moreover, a Hallsignal (Hall voltage) is sensed between the pair of opposing sensecontact elements 34 and 54, which are arranged orthogonally to the pairof opposing supply contact elements 42, 62, which currently feed thebiasing current to the active Hall region 10 in the fourth biasingcurrent direction.

The above described four-phase spinning current operation is equallyapplicable to example Hall effect devices having, for example, mterminals structures (where m is 4, 8, 16, . . . ), wherein the spinningcurrent phases are then cyclically rotated by 360°/m (90°, 45°, 22.5°etc.) in order to average the output signal over one full switchingperiod of 360°.

Moreover, the above described different phases of a spinning currentoperation is equally applicable to a m-phase spinning current operationin a counterclockwise direction with respect to FIG. 1 c.

Moreover, the control circuit 80 of FIG. 1c may be also configured toapply the modes of a compensation operation, such as a spinning currentcompensation, to the terminal structures of the active Hall region 10having the three triangular active sub-regions 10-1, 10-2, 10-3 as shownin FIG. 1b (E). The switchable supply contact elements 32, 42, 52/32′,42′, 52′/32″, 42″, 52″ and the sense contact elements 34, 44, 54/34′,44′, 54′/34″, 44″, 54″ of the active sub-regions 10-1, 10-2, 10-3 areselectively interconnectable (e.g. by means of the control device 80) insuch a way to perform the different phases of the compensationoperation.

The control circuit 80 of FIG. 1c may be alternatively or additionallyconfigured to apply at least one mode of a calibration operation to theterminal structures 30, 40, 50, 60 at the active Hall region 10.

FIGS. 1d (1)-1 d(2) shows a principle illustration of different modes ofa calibration operation of an example Hall effect device 100 under thecontrol of the associated controller circuit (not shown in FIGS. 1d(1)-1 d(2)) according to another embodiment of the present invention.

For facilitating the explanation of the different modes of a calibrationoperation, only the actively used contact elements, i.e. the contactelements controlled and sensed by the controller circuit during therespective calibration operations, are described in FIGS. 1d (1)-1 d(2).The remaining (unused) contact elements are indicated with “disabled”.

For achieving an accurate detection and evaluation of the magneticfields by the Hall effect device 100, an adjustment or calibration ofthe Hall effect device 100 may be necessary. As part of such acalibration, a predetermined magnetic field may be applied to the activeregion of the Hall effect device and the sensor offset is calculatedfrom different sensor output values when the magnetic field is applied,for example, with different magnetic field strengths and/or with anabsent magnetic field. Based on the resulting change of the measurementsignals, e.g. the resulting Hall voltages, which are caused by thedifferent magnetic fields in the active Hall region 10, the actualsensitivity of the Hall effect device 100 can be determined, and thenused for correcting the measuring results.

In a first mode of calibration operation (calibration mode 1) as shownin FIG. 1d (1), the control circuit (not shown in FIG. 1d (1)) isconfigured to supply or force a biasing current I_(BIAS) between thepair of opposing supply contact elements 32, 52 and to sense a measuringsignal U_(MEAS) between the pair of opposing sense contact elements 44,64, wherein the pair of opposing supply contact elements 32, 52 and thepair of opposing sense contact elements 44, 64 are arranged rectangularto each other with respect to the center point 12 of the active Hallregion 10.

Moreover, the control circuit is configured to repeatedly inverse (e.g.to chop or switch) the direction of the biasing current between the pairof opposing supply contact elements 32, 52, and to sense the differentmeasuring signals U_(MEAS) based on and considering the different (e.g.opposite) directions of the biasing current I_(BIAS).

In a second mode of a calibration operation (calibration mode 2) asshown in FIG. 1d (1), the control circuit is configured to supply thebiasing current I_(BIAS) between the pair of opposing supply contactelements 32, 52 and to sense the measuring signals U_(MEAS) between thefurther pair of opposing supply contact elements 42, 62, wherein thepair of opposing supply contact elements 32, 52 and the further pair ofopposing supply contact elements 42, 62 are situated rectangular to eachother with respect to the center point 12 of the active Hall region 10.

The control circuit is further configured to repeatedly inverse thedirection of the biasing current between the pair of opposing supplycontact elements 32, 52, and to sense the resulting measuring signalsU_(MEAS) based on the different directions of the biasing currentI_(BIAS).

In a third mode of a calibration operation (calibration mode 3) as shownin FIG. 1d (1), the control circuit is further configured to supply thebiasing current I_(BIAS) between the pair of opposing sense contactelements 44, 64 and to sense the measuring signal U_(MEAS) between thepair of opposing supply contact elements 32, 52, wherein the pair ofopposing sense contact elements 64, 44 and the pair of opposing supplycontact elements 32, 52 are situated rectangular to each other withrespect to the center point 12 of the active Hall region 10.

The control circuit is further configured to repeatedly inverse thedirection of the biasing current I_(BIAS) between the pair of opposingsense contact elements 44, 64, and to sense the resulting measuringsignals based on the different directions of the biasing currentI_(BIAS).

In a fourth mode of a calibration operation (calibration mode 4) shownin FIG. 1d (2), the control circuit is further configured to supply thebiasing current I_(BIAS) between a pair of opposing sense contactelements 34, 54 and to sense the measuring signal U_(MEAS) between afurther pair of opposing sense contact elements 44, 64, wherein the pairof opposing sense contact elements 34, 54 and the further pair ofopposing sense contact elements 44, 64 are situated rectangular to eachother with respect to the center point 10 of the active Hall region.

In the calibration mode 4, the control circuit is further configured torepeatedly inverse the direction of the biasing current I_(BIAS) betweenthe pair of opposing sense contact elements 34, 54, and to sense theresulting measuring signals U_(MEAS) between the further pair ofopposing sense contact elements 44, 64 based on the different directionsof the biasing current.

In a fifth mode of a calibration operation (calibration mode 5) as shownin FIG. 1d (2), the control circuit is further configured to supply thebiasing current I_(BIAS) between a pair of opposing terminal structures30, 50, and to sense the measuring signal U_(MEAS) between a furtherpair of opposing terminal structures 40, 60, wherein the pair ofopposing terminal structures 30, 50 and the further pair of opposingterminal structures 40, 60 are situated rectangular to each other withrespect to the center point of the active Hall region.

To be more specific, in the fifth calibration mode, the control circuitis configured to supply the biasing current I_(BIAS) simultaneously tothe supply contact element 32 and (in parallel) the sense contactelement 34 of the first terminal structure 30 and to receive the biasingcurrent I_(BIAS) in parallel at the supply contact element 52 and thesense contact element 54 of the third terminal structure 50. Inaddition, the resulting measuring signals U_(MEAS) are sensed betweenthe second terminal structure 40 (with the supply contact element 42and, in parallel, the sense contact element 44) and the fourth terminalstructure 60 (with the supply contact element 62 and, in parallel, thesense contact element 64).

Moreover, the control circuit is further configured to repeatedlyinverse the direction of the biasing current I_(BIAS) between the pairof opposing terminal structures 30 and 50.

The different configurations as shown in the calibration modes 1 to 5 ofFIGS. 1d (1)-1 d(2) can equally be applied to other complementary pairsof the symmetrically arranged contact elements. Thus, the direction ofthe biasing current can alternatively or additionally be changed by+/−90° by means of the control circuit to apply the first to fifth modesof a calibration operation to other pairs of the symmetrically arrangedcontact elements which are, for example, offset by +/−90° when comparedto the calibration configurations of FIGS. 1d (1)-1 d(2).

Moreover, the control circuit 80 of FIGS. 1d (1)-1 d(2) may beconfigured to apply at least one mode of a calibration operation, suchas a spinning current compensation, to the terminal structures of theactive Hall region 10 having the three triangular active sub-regions10-1, 10-2, 10-3 as shown in FIG. 1b . The switchable supply contactelements 32, 42, 52/32′, 42′, 52′/32″, 42″, 52″ and the sense contactelements 34, 44, 54/34′, 44′, 54′/34″, 44″, 54″ of the activesub-regions 10-1, 10-2, 10-3 are selectively interconnectable (e.g. bymeans of the control device 80) in such a way to perform the calibrationoperation. In the different calibration modes, the control circuit canbe further configured to repeatedly inverse the direction of the biasingcurrent I_(BIAS) through one or more of the active sub-regions 10-1,10-2, 10-3.

During a calibration operation, multiple permutations of the (e.g.symmetrical) interconnection of the switchable supply contact elements(the force contacts) 32, 42, 52/32′, 42′, 52′/32″, 42″, 52″ and theassociated sense contact elements (the sense contacts) 34, 44, 54/34′,44′, 54′/34″, 44″, 54″ may be selectively performed. Based on thedifferent measuring results during the different calibration modes, anexact calibration of the Hall effect device 10 may be achieved by meansof at least one of (various) statistical or mathematical evaluationmethods using the measuring results.

FIG. 2a shows a schematic top view of an exemplary Hall effect device100, wherein the transistor elements 32, 42, 52, 62 respectivelycomprise a bipolar junction transistor. In case, the active Hall region10 comprises an n-type conductivity, the bipolar junction transistors32, 42, 52, 62 are npn bipolar transistors (npn switches). As shown inFIG. 2a , the dashed line indicates the second terminals 32 b, 42 b, 52b, 62 b of the transistor elements 32, 42, 52, 62 which contact theactive Hall region 10 or extend in the active Hall region 10. Thus, in aswitched-on state of the respective transistor element 32, 42, 52, 62,the first transistor terminal 32-1, 42-1, 52-1, 62-1 is respectivelypart of the active Hall region 10. Thus, each terminal structure 30, 40,50, 60 at the active Hall region or Hall plate 10 combines a broad,switchable supply contact element 32, 42, 52, 62 and a small sensecontact element 34, 44, 44, 54.

During a phase of a spinning current operation (see above), when abiasing current I_(BIAS) is forced through the active Hall region 10,the biasing current I_(BIAS) is enabled by a semiconductor switch, e.g.in form of a bipolar junction transistor as shown in FIG. 2a . When theHall signal (Hall voltage) is sensed at the respective terminalstructure 30, 40, 50, 60, the neighboring broad supply contact element(force contact) is disabled (switched off) and only the “small” sensecontact element is working. Thus, the active Hall region, parts of theswitching elements in the form of the switchable supply contact elementsand the sense contact elements are combined in the semiconductormaterial of the Hall effect device (Hall sensor device) 100.

In other words, in a first implementation the biasing current supplyterminals (switchable supply contact elements) are operated by a bipolarjunction transistor, i.e. the force contact is switched on by thenpn-transistor in an operation mode for supplying the biasing current.Otherwise, the force contact is switched off by the npn-transistor,wherein the neighboring sense contact is active for sensing the Hallvoltage. The bipolar junction transistors 32, 42, 52, 62 may betriggered by a control current via the controller circuit or multiplexer(not shown in FIG. 2a ) for applying a spinning current operation or acalibration operation to the Hall effect device 100.

FIG. 2b shows a schematic cross-section view of the exemplary Halleffect device along the symmetry line “A”.

As shown in the cross sectional view of FIG. 2b , an n-epitaxy-layer 114is formed on a substrate, e.g. a p-substrate, 110. Between the substrateand the n-epitaxy layer a buried n-layer, e.g. a n⁺-buried layer, 112 isarranged. The switchable supply contact elements 32 and 52 areimplemented by means of npn transistors (bipolar junction transistors)having a first transistor terminal 32 a, 52 a, a second transistorterminal 32 b, 52 b and a control terminal (base) 32 c, 52 c. Moreover,the connecting lines 32-1, 32-2, 34-4 of the switchable supply contactelement 32 and the connecting lines 52-1, 52-2, 54-1 of the switchablesupply contact element 52 are shown.

As shown in FIG. 2b , the second transistor terminals 32 b, 52 b contactthe active Hall region (or Hall well) 10 or extend in the active Hallregion 10. Moreover, the sense contact elements 34, 54 are arranged inthe active Hall region 10 and neighboring to the transistor elements 32,52. Moreover, the n-epitaxy layer 114 may be at least partially coveredby means of an isolation layer 118.

In FIG. 2b , the p-isolation layer 116 comprises contact elements 116-1,116-2 for applying a biasing voltage to the p-isolation layer 116.Moreover, the n-epitaxy layer 114 comprises contact elements 114-1,114-2 for providing a biasing voltage to the n-epitaxy layer 114 forproviding an electronic isolation of the active Hall region 10 in alateral direction and a depth direction from the residual n-epitaxylayer 114.

Moreover, FIG. 2b shows substrate contacts 110-1, 110-2 in the form ofisolated vias from the surface of the epitaxy layer 114 to the substrate110. The conductive vias 110-1, 110-1 may be isolated from the materialof the n-epitaxy layer 114 and the n-layer 112 by means of a isolationmaterial surrounding the conducting core. As shown in FIG. 2b , ametal-1-layer 120 is indicated over the surface of the isolation layer118, wherein the metal-1-layer (or further metal layers) can provide awiring for the Hall effective device 100.

The Hall effect device 100 of FIG. 2b is formed in the n-epitaxy-layer114. In other words, the active Hall region 10 in the form of a n-wellis formed in or on the top of the n-epitaxy-layer 114, wherein then-epitaxy-layer 114 (n-epi-layer) comprises an isolation arrangement 116(p-iso-layer) to isolate the active Hall region 10 in a lateraldirection and a depth direction from the n-epitaxy-layer 114, thesubstrate 110, and/or other electronic devices in the substrate 110 orthe n-epitaxy-layer 114.

With respect to the above described Hall effect device 100, it should benoted that also complementary conductivity types, such as a p-typeactive Hall region 10 and pnp-transistors 32, 42, 52 62, etc., areequally applicable to the inventive concept.

FIG. 3a shows a schematic top view of an example Hall effect device 100,wherein the transistor elements 32, 42, 52, 62 respectively comprisefield effect transistors, such as CMOS transistors. In case, the activeHall region 10 comprises an n-type conductivity, the field effecttransistors 32, 42, 52, 62 are n-channel field effect transistors. Asshown in FIG. 3a , the dashed line indicates the second terminals 32 b,42 b, 52 b, 62 b of the transistor elements 32, 42, 52, 62 which contactthe active Hall region 10 or extend in the active Hall region 10. Thus,in a switched-on state of the respective transistor element 32, 42, 52,62, the second transistor terminal 32 b, 42 b, 52 b, 62 b isrespectively part of the active Hall region 10. Thus, each terminalstructure 30, 40, 50, 60 at the active Hall region 10 combines a broad,switchable supply contact element 32, 42, 52, 62 and a small sensecontact element 34, 44, 44, 54.

During a phase of a spinning current operation (see above), when abiasing current I_(BIAS) is forced through the active Hall region 10,the biasing current I_(BIAS) is enabled by a semiconductor switch, e.g.in form of a field effect transistor as shown in FIG. 3a . When the Hallsignal U_(HALL) is sensed at the respective terminal structure 30, 40,50, 60, the neighboring broad supply contact element (force contact) isdisabled (switched off) and only the “small” sense contact element isworking. Thus, the active Hall region, at least parts of the switchingelements in the form of the switchable supply contact elements and thesense contact elements are combined in the semiconductor material of theHall effect device.

In other words, in a second implementation the biasing current supplyterminals (switchable supply contact elements) are operated by a fieldeffect transistor, i.e. the force contact is switched on by theCMOS-transistor in an operation mode for supplying the biasing current.Otherwise, the force contact is switched off by the CMOS-transistor,wherein the neighboring sense contact is active for sensing the Hallvoltage. The field effect transistors 32, 42, 52, 62 may be triggered bya control current via a controller circuit or multiplexer (not shown inFIG. 3a ) for applying a spinning current operation or a calibrationoperation to the Hall effect device 100.

With respect to the above described Hall effect device 100, it should benoted that also complementary conductivity types, such as a p-typeactive Hall region 10 and p-channel field effect transistors 32, 42, 5262, etc., are equally applicable to the inventive concept.

FIG. 3b shows a schematic cross-section view of the exemplary Halleffect device along the symmetry line “A”.

As shown in the cross sectional view of FIG. 3b , the switchable supplycontact elements 32 and 52 are implemented by means of CMOS transistors(field effect transistors) having a first transistor terminal 32 a, 52a, a second transistor terminal 32 b, 52 b and a control terminal (gate)32 c, 52 c. Moreover, the connecting lines 32-1, 32-2, 34-4 of theswitchable supply contact element 32 and the connecting lines 52-1,52-2, 54-1 of the switchable supply contact element 52 are shown. Thesecond transistor terminals 32 b, 52 b contact the active Hall region 10or extend in the active Hall region 10. Moreover, the sense contactelements 34, 54 are arranged in the active Hall region 10 andneighboring to the transistor elements 32, 52.

The further elements shown in FIG. 3b may have the same structure andfunctionality as the respective elements shown in FIG. 2b . Thus, thedescription provided above for the elements in FIG. 2b are equallyapplicable to the further elements in FIG. 3b having the same referencenumbers.

FIG. 4 shows a flowchart of a method 400 for manufacturing a Hall effectdevice indicative of a magnetic field according to an embodiment. At402, an active Hall region of a first semiconductor type formed in or ontop of a substrate is provided, wherein the substrate comprises anisolation arrangement to isolate the Hall effect region in lateraldirection and a depth direction from the substrate or other electronicdevices in the substrate. At 404, four supply contact elements at theactive Hall region are provided, wherein each supply contact elementcomprises a transistor element with a first transistor terminal, asecond transistor terminal, and a control terminal, wherein the secondtransistor terminal contacts the active Hall region or extends in theactive Hall region. Moreover, at 404, at least four sense contactelements in the active Hall region are provided, wherein the sensecontact elements are placed neighboring to the switchable supply contactelements.

When summarizing the above described embodiments it becomes clear thatthe magnetic sensitivity of a Hall effect element is dependent on thegeometry of the sense contacts of the active Hall region. Small sensecontacts give a higher magnetic sensitivity than broad contacts, theeffect increases the sensitivity in a range of about 25%. When designinga rectangular active Hall region these sense contacts can be optimizedfor a reproducibility, resistance, process requirements and magneticsensitivity.

In order to reduce a loss of sensitivity and to provide a balance withlow offset and jitter, the Hall effect devices 100 combines in eachterminal of the active Hall region 10, a (relatively) broad forcecontact and a (relatively) small sense contact. When a bias current isforced, the current is enabled by a semiconductor switch 32, 42, 52, 62,e.g. a CMOS transistor or a bipolar transistor. When the Hall voltageU_(HALL) is sensed, the neighboring broad force contact is disabled andonly the small sense contact is working. The Hall plate 10, the sensingelements 34, 44, 54, 64 and the switching elements 32, 42, 52, 62 arecombined in the Hall sensor device 100.

In a first operation mode of the Hall effective device 100, therespective force contact will be switched on by the npn transistor,otherwise the sense contact is active. The npn transistor will betriggered by the force current via multiplexing (e.g. for providing aspinning current mode).

In a second operation mode of the Hall effective device 100, therespective force contacts will be switched on by the CMOS transistor,otherwise the sense contact is active. The CMOS transistor will betriggered by the force current via multiplexing (e.g. for providing aspinning current mode). The resulting Hall effect device 100 realizes anarea optimized implementation of operated sense contacts 34, 44, 54, 64and force contacts 32, 42, 52, 62.

The Hall effect device 100 achieves a high sensitivity and provides abalance with low offset and jitter.

In the present application an electrical coupling between two terminalsshould be understood as a direct low ohmic coupling or an indirectcoupling with one or more elements between, such that a signal at asecond node is dependent on a signal at a first node, which is coupledto the second node. Between two coupled terminals a further element maybe coupled, but not necessarily need to be, such that two terminalswhich are coupled to each other may be also directly connected to eachother (e.g. by means of a low impedance connection, such as a wire or awire trace).

Furthermore, according to the present application a first terminal isdirectly connected to a second terminal, if a signal at the secondterminal is equal to a signal at the first terminal, wherein parasiticeffects or minor losses due to conductor resistances shall not beregarded. In other words, two terminals which are directly connected toeach other are typically connected by means of wire traces or wireswithout additional elements in between.

Furthermore, according to the present application, a first terminal of atransistor may be a source terminal or an emitter terminal of thetransistor or may be a drain terminal or a collector terminal of thetransistor. A second terminal of the transistor may be a drain terminalor a collector terminal of the transistor or may be a source terminal oran emitter terminal of the transistor. A control terminal of thetransistor may be a gate terminal or a base terminal of the transistor.Therefore, a switchable path of a transistor may be a drain source pathof a field-effect transistor or an emitter collector path of a bipolarjunction transistor. A main transistor current is typically routed fromthe first terminal to the second terminal of the transistor or viceversa.

Furthermore two nodes or terminals are electrically coupled if acoupling path (e.g. a switchable path of a transistor) between the twocoupled nodes or terminals is in a low impedance state and areelectrically decoupled if the coupling path is in a high impedancestate.

The methods described herein may be supplemented by any of the featuresand functionalities described herein with respect to the apparatus, andmay be implemented using the hardware components of the apparatus.

Although some aspects have been described in the context of an apparatusor controller, it is clear that these aspects also represent adescription of the corresponding method, where a block or devicecorresponds to a method step or a feature of a method step. Analogously,aspects described in the context of a method step also represent adescription of a corresponding block or item or feature of acorresponding apparatus or controller. Some or all of the method stepsmay be executed by (or using) a hardware apparatus, like for example, amicroprocessor, a programmable computer or an electronic circuit. Insome embodiments, some one or more of the most important method stepsmay be executed by such an apparatus.

Depending on certain implementation requirements, embodiments of theinvention can be implemented in hardware or in software. Theimplementation can be performed using a digital storage medium, forexample a floppy disk, a DVD, a Blue-Ray, a CD, a ROM, a PROM, an EPROM,an EEPROM or a FLASH memory, having electronically readable controlsignals stored thereon, which cooperate (or are capable of cooperating)with a programmable computer system such that the respective method isperformed. Therefore, the digital storage medium may be computerreadable.

Some embodiments according to the invention comprise a data carrierhaving electronically readable control signals, which are capable ofcooperating with a programmable computer system, such that one of themethods described herein is performed.

Generally, embodiments of the present invention can be implemented as acomputer program product with a program code, the program code beingoperative for performing one of the methods when the computer programproduct runs on a computer. The program code may for example be storedon a machine readable carrier.

Other embodiments comprise the computer program for performing one ofthe methods described herein, stored on a machine readable carrier.

In other words, an embodiment of the inventive method is, therefore, acomputer program having a program code for performing one of the methodsdescribed herein, when the computer program runs on a computer.

A further embodiment of the inventive methods is, therefore, a datacarrier (or a digital storage medium, or a computer-readable medium)comprising, recorded thereon, the computer program for performing one ofthe methods described herein. The data carrier, the digital storagemedium or the recorded medium are typically tangible and/ornon-transitionary.

A further embodiment of the inventive method is, therefore, a datastream or a sequence of signals representing the computer program forperforming one of the methods described herein. The data stream or thesequence of signals may for example be configured to be transferred viaa data communication connection, for example via the Internet.

A further embodiment comprises a processing means, for example acomputer, or a programmable logic device, configured to or adapted toperform one of the methods described herein.

A further embodiment comprises a computer having installed thereon thecomputer program for performing one of the methods described herein.

A further embodiment according to the invention comprises an apparatusor a system configured to transfer (for example, electronically oroptically) a computer program for performing one of the methodsdescribed herein to a receiver. The receiver may, for example, be acomputer, a mobile device, a memory device or the like. The apparatus orsystem may, for example, comprise a file server for transferring thecomputer program to the receiver.

In some embodiments, a programmable logic device (for example a fieldprogrammable gate array) may be used to perform some or all of thefunctionalities of the methods described herein. In some embodiments, afield programmable gate array may cooperate with a microprocessor inorder to perform one of the methods described herein. Generally, themethods are preferably performed by any hardware apparatus.

The above described embodiments are merely illustrative for theprinciples of the present invention. It is understood that modificationsand variations of the arrangements and the details described herein willbe apparent to others skilled in the art. It is the intent, therefore,to be limited only by the scope of the impending patent claims and notby the specific details presented by way of description and explanationof the embodiments herein.

Although each claim only refers back to one single claim, the disclosurealso covers any conceivable combination of claims.

The invention claimed is:
 1. A method of manufacturing a Hall effectdevice indicative of a magnetic field, comprising: providing an activeHall region of a first semiconductor type formed in or on top of asubstrate, wherein the substrate comprises an isolation arrangement toisolate the Hall effect region in a lateral direction and a depthdirection from the substrate or other electronic devices in thesubstrate; providing a plurality of switchable supply contact elementsat the active Hall region, wherein each switchable supply contactelement comprises a transistor element with a first transistor terminal,a second transistor terminal, and a control terminal, wherein the secondtransistor terminal contacts the active Hall region or extends in theactive Hall region; and providing a plurality of sense contact elementsin the active Hall region, wherein the sense contact elements are placedneighboring to the switchable supply contact elements and are spatiallydistinct from one another.
 2. The method according to claim 1, whereinthe supply contact elements are formed as switchable supply contactelements, and wherein the sense contact elements and the switchablesupply contact elements are formed to be separately connected to theactive Hall region.
 3. The method according to claim 1, wherein theterminal structures are provided to form a first pair of opposingterminal structures and a second pair of opposing terminal structures,and wherein a first conjugation line between the opposing terminalstructures of the first pair and a second conjugation line between theopposing terminal structures of the second pair orthogonally intersectin a center point of the active Hall region.
 4. The Hall effect deviceaccording to claim 3, wherein the first pair of opposing terminalstructures is provided to comprise a first pair of opposing supplycontact elements and a first pair of opposing sense contact elements,and wherein the second pair of opposing terminal structures is providedto comprise a second pair of opposing supply contact elements and asecond pair of opposing sense contact elements.
 5. The Hall effectdevice according to claim 4, wherein the terminal structures of thefirst pair of opposing terminal structures are provided to respectivelyoppose each other with respect to the center point of the active Hallregion, and wherein the terminal structures of the second pair ofopposing terminal structures are provided to respectively oppose eachother with respect to the center point of the active Hall region.
 6. TheHall effect device according to claim 4, wherein the first pair ofopposing terminal structures and the second pair of opposing terminalstructures are provided to be respectively situated rectangular to eachother with respect to the center point of the active Hall region.
 7. Themethod according to claim 1, wherein the active Hall region is providedto have a boundary line in form of a n-sided polygon, wherein n is atleast three.
 8. The method according to claim 1, wherein the active Hallregion is provided to have a boundary line in form of a n-sided regularpolygon, wherein n is 4 or a multiple of
 4. 9. The Hall effect deviceaccording to claim 8, wherein the active Hall region is provided to haven terminal structures, wherein the terminal structures are arranged atopposing sides of the regular polygon.
 10. The Hall effect deviceaccording to claim 9, wherein the terminal structures are arranged in acentered position with respect to a midpoint of the respective side ofthe regular polygon.
 11. The Hall effect device according to claim 10,wherein the active Hall region is provided to have n terminalstructures, wherein the n terminal structures are arranged at opposingvertices of the regular polygon.
 12. The method according to claim 1,wherein the active Hall region is provided to have a boundary line inform of a n-armed cross, wherein n is at least three.
 13. The methodaccording to claim 1, wherein the active Hall region is provided to havea boundary line in form of a n-armed cross, wherein n is 4 or a multipleof
 4. 14. The Hall effect device according to claim 13, wherein theactive Hall region is provided to have n terminal structures, whereinthe n terminal structures are arranged in opposing arms of the n-armedcross.
 15. The method according to claim 1, further comprising:providing a control circuit for controlling an operation of the Halleffect device.
 16. The Hall effect device according to claim 15, whereinthe control circuit is configured to apply a different phases of aspinning current operation to the terminal structures at the active Hallregion.
 17. The Hall effect device according to claim 16, wherein thecontrol circuit is configured to selectively switch on one of the pairsof opposing supply contact elements for feeding a biasing current in apredetermined current direction through the active Hall region, and toselectively switch off the remaining supply contact elements during eachof the different phases of a spinning current operation.
 18. The Halleffect device according to claim 15, wherein the control circuit isconfigured to apply at least one mode of a calibration operation to theterminal structures at the active Hall region.
 19. The method accordingto claim 1, wherein the transistor element is formed as a bipolarjunction transistor or a field effect transistor.
 20. The methodaccording to claim 1, wherein the active Hall region is provided tocomprise three triangular active sub-regions.